Oxygen atom density and kinetics in intermediate-pressure radiofrequency capacitively-coupled plasmas in pure O2
We have studied radiofrequency capacitively coupled plasmas in pure O2 using single mode laser cavity ringdown spectroscopy of oxygen atoms at 630 nm. The absolute atom densities and translational temperatures were determined over a range of pressures and RF power . At pressures of 267 Pa and above, the O atom mole fraction increases...